| Model | PH-114 | |||
| type | Screw type sensor head | |||
| Amplifier unit | PL-465 | |||
| Reference distance | 1.5 mm | |||
| Tolerance setting range | ±100 µm around the reference distance (when using the average value comparison method) ±500 µm around the reference distance (when using the absolute value comparison method) | |||
| Minimum resolution | 0.5µm * 1 | |||
| responsiveness | Follows up to 1200s/min | |||
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